Capacitive Pressure Transducer Using Flexible Films

Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

This paper presents the world's first transparent flexible capacitive micromachined ultrasonic transducer (CMUT) that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET)...

Medical imaging using capacitive micromachined ultrasonic transducer arrays.

We are investigating the use of capacitive micromachined ultrasonic transducers (cMUT's) for use in medical imaging. We propose an ultrasound probe architecture designed to provide volumetric ultrasound imaging from within an endoscope channel. A complete automated experimental system has been implemented for testing the imaging performance of cMUT arrays. This PC-based system includes custom-d...

Flexible Hydrogel Capacitive Pressure Sensor for Underwater Applications

This paper reports development of a novel, flexible hydrogel based capacitive pressure sensor. It features a simple design of hydrogel thin film sandwiched between two gold electrodes. The sensor shows linear increase in output with increase in pressure. The microporous network of hydrogel enables high water retention while its flexible and stretchable structure ensures usage over large areas. ...

Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sen...

Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study